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Small-scale plasticity in thin Cu and Al films · UY1 Research Hub

Scientific publications

2003Journal articleEnglish

Small-scale plasticity in thin Cu and Al films (opens in a new tab)

Authors

Max Planck Society

Gerhard Dehm (Corresponding author)
T. John Balk
Hervais Edongué
Eduard Arzt

Microelectronic Engineering

Keywords

metal and thin film mechanics
copper interconnects and reliability
semiconductor materials and devices
materials science
thin film
crystallite
plasticity
epitaxy
composite material
microstructure
substrate (aquarium)
stress (linguistics)
dislocation
transmission electron microscopy
flow stress
metallurgy
nanotechnology
layer (electronics)
geology

Publication details

Year: 2003
Type: Journal article
Language: English
DOI: 10.1016/s0167-9317(03)00395-2 (opens in a new tab)

Access and resources

[DOI]doi.org (opens in a new tab)